Trimethylfluorosilane, with the CAS number 420-56-4, is an organosilicon compound characterized by the presence of three methyl groups and one fluorine atom attached to a silicon atom. It is a colorless gas or liquid at room temperature, exhibiting a pungent odor. This compound is notable for its reactivity, particularly in hydrolysis, where it can release hydrofluoric acid upon contact with moisture, making it potentially hazardous. Trimethylfluorosilane is used in various applications, including as a reagent in organic synthesis and as a precursor for the deposition of silicon-containing films in semiconductor manufacturing. Its volatility and low boiling point facilitate its use in chemical vapor deposition processes. Additionally, it is important to handle this substance with care due to its toxic and corrosive nature, particularly regarding its interaction with water and biological tissues. Proper safety measures, including the use of personal protective equipment and adequate ventilation, are essential when working with trimethylfluorosilane.

trimethylfluorosilane

420-56-4: Fluorotrimethylsilane, Silane, fluorotrimethyl-, Trimethylsilicon fluoride, Trimethylsilyl fluoride, Trimethylfluorosilane

CAS 420-56-4: trimethylfluorosilane

Fluorotrimethylsilane

Ref: IN-DA003QM7

Fluorotrimethylsilane 98%

Ref: 54-PC7860